Optical properties of SnOx thin films: Theory and experiment
- 5 November 1990
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (19) , 1989-1991
- https://doi.org/10.1063/1.104150
Abstract
Transparent and conducting SnOx thin films were made by reactive rf magnetron sputtering of Sn in Ar+O2 onto unheated glass. Optical and electrical properties were reconciled with a quantitative model for wide band‐gap semiconductors. The theory is based on heavy n doping by doubly ionized oxygen vacancies and ionized impurity scattering of the free electrons.Keywords
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