Optical properties of SnOx thin films: Theory and experiment

Abstract
Transparent and conducting SnOx thin films were made by reactive rf magnetron sputtering of Sn in Ar+O2 onto unheated glass. Optical and electrical properties were reconciled with a quantitative model for wide band‐gap semiconductors. The theory is based on heavy n doping by doubly ionized oxygen vacancies and ionized impurity scattering of the free electrons.