Transparent conducting SnOx films high rate reactively sputtered onto polyester foil
- 1 February 1990
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 29 (4) , 447-448
- https://doi.org/10.1364/ao.29.000447
Abstract
Thin SnOx films were applied to polyester foil by reactive rf magnetron sputtering. Typical data for 0.3-μm thick films were ~150-Ω resistance/square and ~76% luminous transmittance. Deposition rates exceeding 1 nm/s were obtained.Keywords
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