Direct Conversion of Metal Acetylacetonates and Metal Organic Acid Salts into Metal Oxides Thin Films Using Coating Photolysis Process with An ArF Excimer Laser

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Abstract
Metal oxide films of TiO2, In2O3, ZrO2, ZnO, SnO2 and Fe2O3 have been successfully prepared by the coating photolysis process using ArF excimer laser irradiation at room temperature. When using metal acetylacetonates (acac) as the starting material, TiO2, In2O3 and ZrO2 were obtained with ArF laser irradiation at 50 mJ/cm2 at a repetition rate of 5 Hz for 5 min. When using Zn-acac, Fe, Sn, or In 2-ethylhexanoate as the starting material, a two-step process consisting of preliminary weak and sufficiently strong irradiation was found to be effective for obtaining ZnO, Fe2O3, SnO2 and In2O3 films.