NH4OH-based etchants for silicon micromachining: Influence of additives and stability of passivation layers
- 31 October 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 25 (1-3) , 1-7
- https://doi.org/10.1016/0924-4247(90)87001-y
Abstract
No abstract availableKeywords
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