Laser-Induced Chemical Vapor Deposition of Silicon Nitride Films
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Post-deposition high temperature processing of silicon nitrideThin Solid Films, 1983
- Sinterable Ceramic Powders from Laser-Driven Reactions: I, Process Description and ModelingJournal of the American Ceramic Society, 1982
- UV Laser-Initiated Formation of Si3N4MRS Proceedings, 1982
- Time resolved molecular electronic energy transfer into a silver surfaceThe Journal of Chemical Physics, 1980
- The hydrogen content of plasma-deposited silicon nitrideJournal of Applied Physics, 1978