Influence of the oxygen incorporation on the stability of Al/TiN/Si structures
- 1 June 1993
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 70-71, 475-478
- https://doi.org/10.1016/0169-4332(93)90564-r
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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