Sputtering effects in Auger depth profiles of TiN thin films
- 1 July 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 174, 143-148
- https://doi.org/10.1016/0040-6090(89)90882-1
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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