Problems of quantitative Auger analysis of TiN_x thin films: Peak overlapping and line shape changes

This publication has 32 references indexed in Scilit:

• Summary Abstract: Auger analysis of sputter deposited TiNx thin films
  Journal of Vacuum Science & Technology A, 1988
• A comparative study of the diffusion barrier properties of TiN and ZrN
  Thin Solid Films, 1986
• X-ray-emission-spectroscopy study of vacancy-induced electronic states in substoichiometricTiNx
  Physical Review B, 1986
• Peak resolving of complex Auger spectra by least-squares fitting with prefiltering of spectra: An application to depth profiling
  Journal of Vacuum Science & Technology A, 1986
• Photoemission resonance effects in the nitrides of titanium and zirconium
  Physical Review B, 1984
• Vacancy effects in the x-ray photoelectron spectra ofTiNx
  Physical Review B, 1983
• Analysis of the auger electron line shape to determine the composition of Cu-Ni alloys
  Surface and Interface Analysis, 1983
• Photoemission study of the electronic structure of stoichiometric and substoichiometric TiN and ZrN
  Physical Review B, 1982
• Composition profile across a NiO/Ni interface determined from Auger electron peak shape analysis
  Surface and Interface Analysis, 1980
• Beam effects in Auger electron spectroscopy analysis of titanium oxide films
  Journal of Vacuum Science and Technology, 1977