A comparative study of the diffusion barrier properties of TiN and ZrN
- 1 December 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 145 (1) , 81-88
- https://doi.org/10.1016/0040-6090(86)90254-3
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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- ZrN diffusion barrier in aluminum metallization schemesThin Solid Films, 1983
- Summary Abstract: Redistribution of dopants in TiSi2-polycrystalline bilayers during heat treatmentJournal of Vacuum Science & Technology A, 1983
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