ZrN diffusion barrier in aluminum metallization schemes
- 1 June 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 104 (1-2) , 81-87
- https://doi.org/10.1016/0040-6090(83)90550-3
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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