Preparation of PbTiO3 Thin Films by an Excimer Laser Ablation Technique with Second Laser Irradiation

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Abstract
Ferroelectric PbTiO3 thin films have been formed on based electrodes of Pt or oxide superconductor ((La, Sr)2CuO4) by an ArF excimer laser ablation technique. A second laser irradiation at the substrate surface is quite effective in the crystallization of the films at low substrate temperature below 400°C. The suitable energy density of the irradiation laser is in the range of 30-100 mJ/cm2. X-ray diffraction patterns of PbTiO3 thin films show c-axis orientation, with FWHM (full width at half maximum) of rocking curve of 0.5°-1.0°. These films exhibit a ferroelectric hysteresis loop. The dielectric constant and remanent polarization of the PbTiO3 films are in the range of 120-150 and 20-25 µC/cm2, respectively.