The effect of nitrogen doping on the structure of cluster or microcrystalline silicon embedded in thin SiO2 films
- 1 June 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 346 (1-2) , 275-279
- https://doi.org/10.1016/s0040-6090(98)01501-6
Abstract
No abstract availableKeywords
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