Diamond film growth on Ti-implanted glassy carbon
- 20 September 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (12) , 1631-1633
- https://doi.org/10.1063/1.110718
Abstract
The growth of diamond thin films on glassy carbon substrates has been investigated as a function of deposition time for different surface treatments. Implantation of Ti to a dose of 1.7×1017 cm−2 and abrasion with diamond powder have both been examined to determine their effect on film nucleation and growth. At the shorter deposition times studied, diamond nucleation was observed on all test samples with those subjected to the abrasive pretreatment exhibiting the higher growth rates. However, the adhesion and uniformity of films on unimplanted glassy carbon were found to deteriorate significantly following deposition runs of 14 and 21 h duration. This was attributed to a destabilization of the underlying surface caused by plasma erosion.Keywords
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