Application of hydrogen ion beams to Silicon On Insulator material technology
- 1 February 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 108 (3) , 313-319
- https://doi.org/10.1016/0168-583x(95)01056-4
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Silicon on insulator material technologyElectronics Letters, 1995
- Mechanical response of single crystal Si to very high fluence H+ implantationNuclear Instruments and Methods in Physics Research, 1983
- La formation des cloquesNuclear Instruments and Methods in Physics Research, 1983
- The role of inert gases in first wall phenomena in fusion devicesRadiation Effects, 1980
- Distribution of irradiation damage in silicon bombarded with hydrogenPhysical Review B, 1977
- Plasma Contamination and Wall Erosion in Thermonuclear ReactorsIEEE Transactions on Nuclear Science, 1971