Monte Carlo-fluid hybrid model of the accumulation of dust particles at sheath edges in radio-frequency discharges
- 5 August 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (6) , 638-640
- https://doi.org/10.1063/1.105409
Abstract
No abstract availableThis publication has 20 references indexed in Scilit:
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