Fluorocarbon films sputtered under various conditions
- 1 December 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 55 (3) , L11-L13
- https://doi.org/10.1016/0040-6090(78)90170-0
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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