Penetration of Krypton Ions into Molybdenum in a Glow Discharge
- 1 September 1964
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 35 (9) , 2570-2572
- https://doi.org/10.1063/1.1713801
Abstract
Previous work by the authors indicated that the penetration depth of krypton ions into the molybdenum cathode of a glow discharge tube operated at 150 V was the order of 104 Å after a 24-h bombardment (C. Y. Bartholomew and A. R. LaPadula, J. Appl. Phys. 31, 445 (1960)]. Additional results indicate that this penetration depth increases with time of operation of the discharge. A diffusion-like process appears to be dominant in the initial period of bombardment, but later the removal of surface layers by sputtering becomes dominant. The penetration reaches a steady-state condition after a sufficient period of bombardment.This publication has 6 references indexed in Scilit:
- Ion Bombardment of Silicon in a Glow DischargeJournal of Applied Physics, 1963
- THE RANGE OF Cs137 IONS OF KEV ENERGIES IN GERMANIUMCanadian Journal of Chemistry, 1962
- Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion BombardmentJournal of Applied Physics, 1962
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- Cathode sputtering in inert-gas glow dischargesBritish Journal of Applied Physics, 1961
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