Correlation between preirradiation channel mobility and radiation-induced interface-trap charge in metal-oxide-semiconductor transistors
- 17 June 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (24) , 2782-2784
- https://doi.org/10.1063/1.104760
Abstract
We find a strong correlation between preirradiation channel resistance and radiation-induced interface-trap charge in n-channel metal-oxide-semiconductor (MOS) transistors. While it has long been known that the postirradiation mobility of MOS transistors degrades with exposure to ionizing radiation, we believe this is the first time that differences in the postirradiation interface-trap charge have been linked to differences in preirradiation device parameters. A simple model is presented that relates the observed variations in preirradiation channel resistance to scattering from defects at the Si/SiO2 interface which may be precursors to the radiation-induced interface-trap charge.Keywords
This publication has 15 references indexed in Scilit:
- Effect of radiation-induced charge on 1/f noise in MOS devicesIEEE Transactions on Nuclear Science, 1990
- Evidence that similar point defects cause 1/fnoise and radiation-induced-hole trapping in metal-oxide-semiconductor transistorsPhysical Review Letters, 1990
- Correlation between preirradiation 1/f noise and postirradiation oxide-trapped charge in MOS transistorsIEEE Transactions on Nuclear Science, 1989
- Time-dependent degradation of MOSFET channel mobility following pulsed irradiationIEEE Transactions on Nuclear Science, 1989
- Dual-transistor method to determine threshold-voltage shifts due to oxide-trapped charge and interface traps in metal-oxide-semiconductor devicesApplied Physics Letters, 1989
- Noise in solid-state microstructures: A new perspective on individual defects, interface states and low-frequency (1/ƒ) noiseAdvances in Physics, 1989
- noise and other slow, nonexponential kinetics in condensed matterReviews of Modern Physics, 1988
- Using laboratory X-ray and cobalt-60 irradiations to predict CMOS device response in strategic and space environmentsIEEE Transactions on Nuclear Science, 1988
- Simple technique for separating the effects of interface traps and trapped-oxide charge in metal-oxide-semiconductor transistorsApplied Physics Letters, 1986
- The scattering of electrons by surface oxide charges and by lattice vibrations at the silicon-silicon dioxide interfaceSurface Science, 1972