Radical and film growth kinetics in methane radio-frequency glow discharges
- 1 June 1996
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 79 (11) , 8735-8747
- https://doi.org/10.1063/1.362500
Abstract
No abstract availableThis publication has 35 references indexed in Scilit:
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