Investigation of the silicon-plasma silicon nitride interface with in situ transient photoconductivity measurements
- 1 September 1996
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 103 (1) , 11-18
- https://doi.org/10.1016/0169-4332(96)00471-0
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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