The compatibility of aluminium layers on plasma-deposited W and WSi/sub 2/ films
- 1 May 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 35 (5) , 706-708
- https://doi.org/10.1109/16.2518
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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