Atomic Image Observation of Hydrogen-Saturated Si(100) Prepared by Atomic Hydrogen Irradiation
- 1 August 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (8A) , L1121
- https://doi.org/10.1143/jjap.31.l1121
Abstract
Atomic images of hydrogen-saturated Si(100) surface have been successfully observed by scanning tunneling microscope in ultra high vacuum. Prolonged exposures of Si(100) surface to atomic hydrogen irradiation have produced ordered hydrogen-terminated structures such as the (1×1) dihydride phase, and the (3×1) structure which was comprised of the dihydride and (2×1) monohydride phases alternately repeated. Domains of the (3×1) phase separated by anti-phase boundaries were also observed on a given (100) terrace.Keywords
This publication has 13 references indexed in Scilit:
- Low-Temperature Substrate Annealing of Vicinal Si(100) for Epitaxial Growth of GaAs on SiJapanese Journal of Applied Physics, 1991
- Structure of Si(100)H: Dependence on the H chemical potentialPhysical Review B, 1991
- Structure of the H-saturated Si(100) surfacePhysical Review Letters, 1990
- Hydrogen adsorption on Si(100)-2×1 surfaces studied by elastic recoil detection analysisPhysical Review B, 1990
- Scanning tunneling microscopy of silicon surfaces in air: Observation of atomic imagesJournal of Vacuum Science & Technology A, 1990
- I n s i t u cleaning of silicon substrate surfaces by remote plasma-excited hydrogenJournal of Vacuum Science & Technology B, 1989
- Stabilities of single-layer and bilayer steps on Si(001) surfacesPhysical Review Letters, 1987
- New Ordered Structure for the H-Saturated Si(100) Surface: The (3×1) PhasePhysical Review Letters, 1985
- Chemisorption of hydrogen on the Si(100) surface: Monohydride and dihydride phasesPhysical Review B, 1984
- Interplay of the monohydride phase and a newly discovered dihydride phase in chemisorption of H on Si(100)2 × 1Physical Review B, 1976