Atomic Image Observation of Hydrogen-Saturated Si(100) Prepared by Atomic Hydrogen Irradiation

Abstract
Atomic images of hydrogen-saturated Si(100) surface have been successfully observed by scanning tunneling microscope in ultra high vacuum. Prolonged exposures of Si(100) surface to atomic hydrogen irradiation have produced ordered hydrogen-terminated structures such as the (1×1) dihydride phase, and the (3×1) structure which was comprised of the dihydride and (2×1) monohydride phases alternately repeated. Domains of the (3×1) phase separated by anti-phase boundaries were also observed on a given (100) terrace.