Low-Temperature Substrate Annealing of Vicinal Si(100) for Epitaxial Growth of GaAs on Si
- 1 December 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (12S) , 3774
- https://doi.org/10.1143/jjap.30.3774
Abstract
Effects of atomic hydrogen irradiation on vicinal Si(100) surfaces have been investigated by reflection high-energy electron diffraction (RHEED) and scanning tunneling microscope (STM) observations. Interplay of the two different Si hydride phases and dynamic changes in the surface reconstruction have been observed and studied in detail. It has also been shown that removal of oxide from Si surface and a single-domain (2×1) Si surface can be obtained at annealing temperatures below 750°C with atomic hydrogen irradiation, much lower than those usually requied for the conventional thermal treatment methods.Keywords
This publication has 9 references indexed in Scilit:
- Growth of gallium arsenide on hydrogen passivated Si with low-temperature treatment (∼600 °C)Applied Physics Letters, 1991
- Low-Temperature Cleaning of GaAs Substrate by Atomic Hydrogen IrradiationJapanese Journal of Applied Physics, 1991
- Gallium arsenide and other compound semiconductors on siliconJournal of Applied Physics, 1990
- I n s i t u cleaning of silicon substrate surfaces by remote plasma-excited hydrogenJournal of Vacuum Science & Technology B, 1989
- New low-temperature process for growth of GaAs on Si with metalorganic molecular beam epitaxy assisted by a hydrogen plasmaApplied Physics Letters, 1988
- The formation of hydrogen passivated silicon single-crystal surfaces using ultraviolet cleaning and HF etchingJournal of Applied Physics, 1988
- Stabilities of single-layer and bilayer steps on Si(001) surfacesPhysical Review Letters, 1987
- Molecular Beam Epitaxy of Controlled Single Domain GaAs on Si (100)Japanese Journal of Applied Physics, 1986
- Interplay of the monohydride phase and a newly discovered dihydride phase in chemisorption of H on Si(100)2 × 1Physical Review B, 1976