Silicide thin films and their applications in microelectronics
- 1 January 1995
- journal article
- review article
- Published by Elsevier in Intermetallics
- Vol. 3 (3) , 173-186
- https://doi.org/10.1016/0966-9795(95)98929-3
Abstract
No abstract availableThis publication has 40 references indexed in Scilit:
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