Electron-beam writing system and its application to large and high-density diffractive optic elements
- 1 April 1994
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 33 (10) , 2032-2038
- https://doi.org/10.1364/ao.33.002032
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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