Determination of doping and mobility profiles by automatic electrical measurements and anodic stripping
- 1 May 1987
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 20 (5) , 541-544
- https://doi.org/10.1088/0022-3735/20/5/013
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Automated Hall effect profiler for electrical characterisation of semiconductorsElectronics Letters, 1985
- An automated system for the controlled stripping of thin silicon layersRevue de Physique Appliquée, 1978
- Technique used in Hall effect analysis of ion implanted Si and GeSolid-State Electronics, 1970