Optimization in Spot Sizes of Focused MeV Ion Beam by Precise Adjustment of Lens-Current Excitations
- 1 July 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (7A) , L1346
- https://doi.org/10.1143/jjap.27.l1346
Abstract
Effects of lens-current excitations and object slit width on the beam spot sizes have been investigated to minimize the spot size in a microbeam line with 1.5 MeV helium ions, focused by piezo-driven object slits and a magnetic quadrupole doublet. Deviation of a lens-current excitation by 0.5% gave rise to an 80% increase in the beam spot size. A minimum spot size of 0.9 µm ×1.2 µm was obtained by an improvement in the adjustment of the lens-current excitations.Keywords
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