Design and three dimensional calibration of a measuring scanning tunneling microscope for metrological applications
- 1 August 1994
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (8) , 2514-2518
- https://doi.org/10.1063/1.1144643
Abstract
A scanning-tunneling microscope (STM) of the scanning-sample type with transducers for the measurement of the position in all three axes has been developed. Motions in the X-, Y-, and Z-axis are straight and rectangular to a high degree and the capacitance transducers are calibrated in situ by plane mirror laser-interferometry. With these qualities as part of the design, the Abbe error may be minimized. X-Y-capacitance transducers and X-Y-piezo actuators are part of analog servo loops, thus providing positioning in the X-Y-plane to a desired coordinate. The STM is mainly built from commercially available parts.Keywords
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