Predeposition plasma treatment of InSb surface in pecvd SiO2-InSb Structures
- 31 March 1989
- journal article
- Published by Elsevier in Materials Letters
- Vol. 7 (12) , 465-467
- https://doi.org/10.1016/0167-577x(89)90054-2
Abstract
No abstract availableKeywords
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