In situ Auger electron spectroscopy investigation of the chemical bonding of ion-beam-deposited silicon nitride
- 1 May 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 139 (1) , 95-108
- https://doi.org/10.1016/0040-6090(86)90052-0
Abstract
No abstract availableKeywords
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