Gettering of Metallic Impurities in Silicon
- 1 January 1984
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Early stages of oxygen segregation and precipitation in siliconJournal of Applied Physics, 1984
- HREM of SiP precipitates at the (111) silicon surface during phosphorus predepositionUltramicroscopy, 1984
- Gold gettering in silicon by phosphorous diffusion and argon implantation: Mechanisms and limitationsJournal of Applied Physics, 1981
- Simultaneous gettering of Au in silicon by phosphorus and dislocationsApplied Physics Letters, 1978
- Intrinsic gettering by oxide precipitate induced dislocations in Czochralski SiApplied Physics Letters, 1977
- Direct comparison of ion−damage gettering and phosphorus−diffusion gettering of Au in SiJournal of Applied Physics, 1975