Zur plasmachemischen Umsetzung von GaAs mit CCl4 und CF2Cl2 in Gegenwart von Sauerstoff
- 1 January 1984
- journal article
- research article
- Published by Wiley in Contributions to Plasma Physics
- Vol. 24 (6) , 645-656
- https://doi.org/10.1002/ctpp.19840240611
Abstract
No abstract availableKeywords
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