High-performance planar inductor on thick oxidized porous silicon (OPS) substrate
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Microwave and Guided Wave Letters
- Vol. 7 (8) , 236-238
- https://doi.org/10.1109/75.605489
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Selective oxidized porous silicon (SOPS) substrate for microwave power chip-packagingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- High-Q inductors in standard silicon interconnect technology and its application to an integrated RF power amplifierPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Optimization of high Q integrated inductors for multi-level metal CMOSPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Monolithic planar RF inductor and waveguide structures on silicon with performance comparable to those in GaAs MMICPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniquesIEEE Transactions on Microwave Theory and Techniques, 1995
- Multilevel monolithic inductors in silicon technologyElectronics Letters, 1995
- Microwave performance of SOI n-MOSFETs and coplanar waveguidesIEEE Electron Device Letters, 1991
- Si IC-compatible inductors and LC passive filtersIEEE Journal of Solid-State Circuits, 1990