A self-aligned GaAs MESFET process with WSi gates for analog and digital applications
- 31 August 1991
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 34 (8) , 861-866
- https://doi.org/10.1016/0038-1101(91)90232-n
Abstract
No abstract availableKeywords
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