beta -diketonate precursors for the chemical vapour deposition of YBaCuO

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Abstract
The quality of the starting materials, especially of the Ba compounds, is highly important in the CVD process for YBaCuO. The authors describe details of the preparation, the handling and the transport rates of 2,2,6,6-tetramethyl-3,5-heptanedionates of Y, Ba and Cu. A major problem with the Ba precursor is found in an aging process at room temperature that can be overcome by storage at low temperature. The vapour pressures of the precursors are derived from the transport rates at low carrier gas flow rates and compared with published data.