Chemical vapor deposition of YBa2Cu3O7−x superconducting films
- 1 July 1989
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 66 (1) , 444-447
- https://doi.org/10.1063/1.343845
Abstract
Superconducting thin films of YBa2Cu3O7−x have been produced by chemical vapor deposition. Volatile coordination compound precursors of the oxide components, β‐diketonates of Y, Ba, and Cu, are thermally decomposed on hot substrates to form crystalline films. The Ba compound was evaporated in the presence of externally added vapors of the β‐diketonate to obtain steady evaporative behavior. Superconducting films were obtained on SrTiO3 substrates at temperatures above 800 °C. The best films have onset temperatures of 90 K and loss of resistance as high as 68 K. Epitaxial growth was obtained.This publication has 17 references indexed in Scilit:
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