Fast hydrogen diffusion in amorphous silicon
- 1 December 1987
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 97-98, 807-810
- https://doi.org/10.1016/0022-3093(87)90193-1
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- The diffusion of hydrogen in amorphous siliconJournal of Non-Crystalline Solids, 1983
- Determination of the hydrogen diffusion coefficient in hydrogenated amorphous silicon from hydrogen effusion experimentsJournal of Applied Physics, 1982
- Deuterium passivation of grain-boundary dangling bonds in silicon thin filmsApplied Physics Letters, 1982
- Post-hydrogenation of CVD deposited a-Si filmsJournal of Non-Crystalline Solids, 1980
- Exodiffusion of hydrogen in amorphous siliconJournal of Non-Crystalline Solids, 1980
- A SIMS analysis of deuterium diffusion in hydrogenated amorphous siliconApplied Physics Letters, 1978