Surface Defects in Polished Silicon Studied by Cross‐Sectional Transmission Electron Microscopy
- 1 July 1989
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 72 (7) , 1136-1139
- https://doi.org/10.1111/j.1151-2916.1989.tb09696.x
Abstract
No abstract availableKeywords
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