Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
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- Second-order effects in self-testable accelerometersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978