Femtosecond laser ablation of gallium arsenide investigated with time-of-flight mass spectroscopy
- 11 May 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (19) , 2385-2387
- https://doi.org/10.1063/1.121364
Abstract
We have investigated femtosecond laser-induced ablation of gallium arsenide using time-of-flight mass spectroscopy. At the ablation threshold, we estimated surface temperatures on the order of 3500 K. We observed a clear thresholdlike effect in the number of detected particles and with increasing fluence free flight desorption transforms into a collisional expansion process. Above the ablation threshold, the behavior of gallium particles can be quantitatively described through Knudsen-layer theory.Keywords
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