Fabrication and characterization of a silicon microvalve
- 1 January 1992
- journal article
- research article
- Published by Wiley in Journal of Microcolumn Separations
- Vol. 4 (1) , 13-15
- https://doi.org/10.1002/mcs.1220040104
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of siliconSensors and Actuators, 1989
- Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)Sensors and Actuators, 1989
- Silicon as a mechanical materialProceedings of the IEEE, 1982