X-ray-diffraction measurement of interface structure in GaAs/Si(001)
- 15 May 1991
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 43 (15) , 12425-12430
- https://doi.org/10.1103/physrevb.43.12425
Abstract
We have developed an x-ray-diffraction technique that provides depth sensitivity to the near-interface region of a thick, nonregistered film. By measuring the intensity profiles along the Si[00l] substrate crystal truncation rods, we compare the diffraction from the Si/GaAs interface with a model based on a grid of misfit dislocations. We find that the interface atoms have a root-mean-square displacement of 1.09±0.10 Å and that the interface has a roughness of 2.9±1.0 Å. The diffraction indicates an anomalously small strain perpendicular to the interface in the GaAs near the interface.Keywords
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