LIGA Technologies and Applications
- 1 April 2001
- journal article
- Published by Springer Nature in MRS Bulletin
- Vol. 26 (4) , 337-340
- https://doi.org/10.1557/mrs2001.76
Abstract
LIGA, an acronym for the German words for lithography, electroplating, and molding, is a technique used to produce micro-electromechanical systems (MEMS) made from metals, ceramics, or plastics. The LIGA process utilizes x-ray synchrotron radiation as a lithographic light source. Highly collimated, high-energy x-rays from the synchrotron impinge on a patterned mask in proximity to an x-ray-sensitive photoresist, typically poly(methyl methacrylate) (PMMA).Keywords
This publication has 12 references indexed in Scilit:
- High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDMMicrosystem Technologies, 2000
- The influence of mask substrate thickness on exposure and development times for the LIGA processMicrosystem Technologies, 2000
- The influence of feature sidewall tolerance on minimum absorber thickness for LIGA x-ray masksJournal of Micromechanics and Microengineering, 1999
- Innovative molding technologies for the fabrication of components for microsystemsPublished by SPIE-Intl Soc Optical Eng ,1999
- Materials of LIGA technologyMicrosystem Technologies, 1999
- Characterization of a Time Multiplexed Inductively Coupled Plasma EtcherJournal of the Electrochemical Society, 1999
- Hot embossing - The molding technique for plastic microstructuresMicrosystem Technologies, 1998
- Microfabrication using synchrotron radiationReports on Progress in Physics, 1998
- New development strategies for high aspect ratio microstructuresMicrosystem Technologies, 1998
- SU-8: a low-cost negative resist for MEMSJournal of Micromechanics and Microengineering, 1997