The structure of gold silicide in thin Au/Si films
- 1 May 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 68 (2) , 373-379
- https://doi.org/10.1016/0040-6090(80)90269-2
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
- Formation, structure, and orientation of gold silicide on gold surfacesJournal of Applied Physics, 1976
- Low temperature diffusion of Au into Si in the Si(substrate)-Au(film) systemThin Solid Films, 1975
- On the crystal structure of a non-equilibrium phase in the gold-silicon systemMaterials Science and Engineering, 1974
- Analysis of thin-film structures with nuclear backscattering and x-ray diffractionJournal of Vacuum Science and Technology, 1974
- Auger spectroscopy of submonolayer gold depositions on siliconPhysica Status Solidi (b), 1973
- Diffuse interface in Si (substrate)-Au (evaporated film) systemApplied Physics Letters, 1973
- Metal contact induced crystallization in films of amorphous silicon and germaniumJournal of Non-Crystalline Solids, 1972
- LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUMApplied Physics Letters, 1971
- Eutectic decomposition in the goldsilicon systemMaterials Science and Engineering, 1971
- Formation of New Intermetallic Phases in Binary Eutectic Systems by Drastic Undercooling of the MeltNature, 1966