Liquid and Vapor Phase Growth of III-V Materials for Photonic Devices
- 2 January 1989
- journal article
- website
- Published by Institute of Electrical and Electronics Engineers (IEEE) in AT&T Technical Journal
- Vol. 68 (1) , 53-63
- https://doi.org/10.1002/j.1538-7305.1989.tb00646.x
Abstract
Precisely controlled epitaxial growth of microscopically thin semiconductor layers is essential for lightwave source and detector components. Achieving precise control while simultaneously meeting manufacturing volume and cost requirements is a deman...Keywords
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