Derivation and Simulation of Higher Numerical Aperture Scalar Aerial Images
- 1 December 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (12S)
- https://doi.org/10.1143/jjap.31.4110
Abstract
The application of scalar diffraction theory to a projection optics system is examined here for somewhat higher numerical aperture conditions upon removing the paraxial, or small angle, approximation that is typically made. A detailed derivation is given that notes the key physical assumptions originally contained in work by others on vector imaging theory. The asymptotic limit of large lenses and focal length sizes to object and image sizes is explicitly carried out, while keeping numerical apertures and magnification fixed. Numerical results of the resulting equations are presented for a variety of imaging conditions, including phase shift masks and modified illumination.Keywords
This publication has 20 references indexed in Scilit:
- Lithographic tolerances based on vector diffraction theoryJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Investigation of single sideband optical lithography using oblique incidence illuminationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Extending scalar aerial image calculations to higher numerical aperturesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Photolithography System Using Annular IlluminationJapanese Journal of Applied Physics, 1991
- Spatial filtering for depth of focus and resolution enhancement in optical lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Positive photoresist process simulation over nonplanar substratesJournal of Vacuum Science & Technology B, 1990
- A critical examination of submicron optical lithography using simulated projection imagesJournal of Vacuum Science & Technology B, 1983
- Electromagnetic diffraction in optical systems, II. Structure of the image field in an aplanatic systemProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1959
- Electromagnetic diffraction in optical systems - I. An integral representation of the image fieldProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1959
- On the diffraction theory of optical imagesProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1953