Influence of sapphire substrate orientation on SOS crystalline quality and SOS/MOS transistor mobility
- 30 June 1982
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 58 (1) , 61-72
- https://doi.org/10.1016/0022-0248(82)90210-x
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Silicon‐on‐Sapphire Crystalline Perfection and MOS Transistor MobilityJournal of the Electrochemical Society, 1978
- Sapphire Substrate Misorientation and SOS/MOS Transistor PerformanceJournal of the Electrochemical Society, 1977
- Early growth of silicon on sapphire. I. Transmission electron microscopyJournal of Applied Physics, 1976
- Cross-sectional electron microscopy of silicon on sapphireApplied Physics Letters, 1975
- A Direct Method of Determining Preferred Orientation of a Flat Reflection Sample Using a Geiger Counter X-Ray SpectrometerJournal of Applied Physics, 1949