Hot-electron transport through thin dielectric films: Boltzmann theory and electron spectroscopy

The transport problem of hot quasifree electrons through thin planar dielectric films of thickness d is considered by solving the steady-state Boltzmann equation for the electron current density J(E,μ,x), 0≤x≤d, within the film. The current density of injected electrons at x=0, $J^{\left(i\right)}$(E,μ), evolves to J(E,μ,d), the current density of electrons escaping the layer at x=d, which is calculated.