A CW CO2laser substrate heater for superconducting thin-film deposition
- 1 September 1990
- journal article
- Published by IOP Publishing in Superconductor Science and Technology
- Vol. 3 (9) , 472-475
- https://doi.org/10.1088/0953-2048/3/9/009
Abstract
Single-crystal MgO and SrTiO3 substrates have been raised to temperatures suitable for deposition and in situ annealing of high-Tc superconducting thin films by the absorption of 10.6 mu m laser radiation. Steady-state temperature control in vacuum and low-pressure oxygen was achieved by varying the mark-space ratio of the RF-excited CO2 laser heater source. This approach allows high temperatures (>or=950 K) to be achieved with relatively low power input (<or=30 W) and maintains deposition chamber cleanliness.Keywords
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