Silicon Technologies for Sensor Fabrication

This publication has 28 references indexed in Scilit:

• An integrated gas sensor on silicon substrate with sensitive SnOx layer
  Sensors and Actuators B: Chemical, 1990
• A substrate for thin-film gas sensors in microelectronic technology
  Sensors and Actuators B: Chemical, 1990
• Silicon-on-Insulator Wafer Bonding-Wafer Thinning Technological Evaluations
  Japanese Journal of Applied Physics, 1989
• Thin-film oxygen sensors made of reactively sputtered ZnO
  Sensors and Actuators, 1989
• An Advanced Fabrication Process for 3D-CMOS Devices
  Published by Springer Nature ,1989
• A capacitive humidity sensor based on CMOS technology with adsorbing film
  Sensors and Actuators, 1988
• Sensors with digital or frequency output
  Sensors and Actuators, 1988
• An integrated low-power thin-film CO gas sensor on silicon
  Sensors and Actuators, 1988
• A high current, high voltage oxygen ion implanter
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
• Fabrication and properties of ESFI-SOS-MOST's suitable for both low-voltage and low-power circuits
  IEEE Transactions on Electron Devices, 1978